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Elli-RP (Reflectometer)
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Spectroscopic Reflectometer
Spectroscopic Reflectometer(SR) system offers a robust, fast, and accurate value of film thickness
which is used in the various thin film processes. Ellipso Technology has the unique and advanced
technology of m-FFT for accurate and fast measurement/analysis of thin films.
◈SPECIFICATION
1.Measuring constants Film thickness, Reflectivity, (n,k) vs λ
2.Wavelength range: 400 ~ 950 nm
3.Spot-size: 1.0 mm
4.Thickness range: 20nm ~ 20 μm (depends on film type)
5.Number of layer: Up to 3 layers (depends on film type)
6.Throughput : 1 sec/point (depends on film type)
7.Repeatability : ±1 Å on 10 times measurement
8.Working distance : 120 mm (Customized)
9.Sample size: ~ 150mm or up Customized
◈APPLICATION
Thickness of Dielectrics, Semiconductors, Polymers,
Supporting Backside/Front side Reflections,
Very Thin Films, Very Thick Films
Variable Substrates (Silicon, GaAs, , Al, Steel, Glass, Al2O3, PC, PET, Polymer films and Others)
| Semiconductor | Photoresist, Oxides, Nitrides etc. |
| (Si, SiC, Ge, ZnO, IZO, PR, poly-Si, GaN, GaAs, Si3N4) | |
| Display(OLED, LCD) | ITO, PR, Alq3, CuPc, PVK, PAF, PEDT-PSS, NPB, AF/SiO2 on glass |
| Dielectrics | SiO2, TiO2, Ta2O5, ITO, AIN, ZrO2, Si3N4, Ga2O3, Wet oxides |
| Polymer | Dye, NPB, MNA, PVA, TAC, PR, PET |
| Chemistry | Organic Film(OLED) & LB Thin Film |
| Solar Cell | SiN, a-Si, poly-Si, SiO2, Al2O3 |
| Optical coating | Hardness Coatings, Anti-Reflection Coatings, Filters etc. |
◈OPTION
1.Auto Mapping Stage (150 mm, 200 mm, 300 mm, Customized Size)
2.Option of Spectral Range (UV: 190 nm ~ 1,050 nm), (IR: 900nm ~ 1,700nm, 900nm~2,200nm)
3.Inline Thickness Monitoring (Multi probe, In-Situ, Flexible System Integration)
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- Elli-RP.pdf (8.6M) 170회 다운로드 | DATE : 2019-09-04 17:23:39