Elli-RI (Textured Solarcell) > Spectroscopic Reflectometer & Transmittance

Solar Cell Film Measurement System

Spectroscopic Reflectometer with Integrating Sphere (Elli-RI) offers highly accurate measurements of film thickness. It is well suited for characterization of a variety of materials especially that of SiN anti-reflective coatings on textured multi-crystalline and/or mono-crystalline silicon solar cells.

◈PERFORMANCE

   1.Wavelength range : 450 nm ~ 900 nm
   2.Spot size : 4 mm
   3.Throughput : 1.0 sec. per point (depends on film type)
   4.Measuring constants : Reflectivity, Film thickness, n, k vs λ
   5.Number of layers : Up to 3 layers (depends on film type)
   6.Repeatability (3σ) : ± 0.3 nm on 10 times measurement (depends on film type)
   7.Thickness range : 20 nm ~ 50 μm (depends on film type)

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◈REFLECTOMETER SYSTEM

   1.Light source : 150 W Halogen Lamp
   2.Optic system : Collimating optics system, fiber guided optics
   3.Beam spot size : 4.0 mm
   4.Spectral range : 450 ~ 900 nm
   5.Spectrograph : CCD type
   6.Integrating Sphere :

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◈APPLICATION

   1.Solar Cell
      - Textured Mono- and/or Multi- crystalline Substrates
      - Antireflective Coating(ARC) on Textured Silicon Solar Cell (SiNx, AlNx...)
      - Transparent Conductive Oxides (ITO, ZnOx, doped SnO2, AZO)
      - a-Si, μc-Si, poly-Si
      - Organic PV Materials
      - Dye Sensitized Films

   2.Semiconductor
      - Si, Ge, SiO2, ONO, ZnO, PR, poly-Si, GaN, GaAs

   3.Display
      - (incl. OLED) MgO, ITO, PR, Alq3 , CuPc, PVK, PAF, PEDT-PSS

   4.Dielectrics
      - SiO2, TiO3, Ta2O5, ITO, AIN, ZrO2, Si3N4, Ga2O3, Wet Oxides

   5.Polymer
      - Dye, NPB, MNA, PVA, PET, TAC, PR

   6.Chemistry
      - Organic Film(OLED) & LB Thin Film