Elli-μSE_OCD > Spectroscopic Ellipsometer

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Ellipso Technology
Spectroscopic Ellipsometer

Elli-μSE_OCD

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Micro-spot Spectroscopic Ellipsometer for Semiconductor OCD Application : Ellipso Technology has recently developed a spectroscopic 

ellipsometer with the world's best spot size. AFM or NNISE can be mounted on this Elli-μSE_OCD and operated simultaneously. 

This micro-spot Spectroscopy Ellipsometer equipped with the mapping module and the variable angle-of-incidence module for 

improved measurement precision, is well suited for OCD measurement in semiconductor processes. 

 


◈ Performance / System


Measurement mode

Rotating Compensator Ellipsometer (RCE)

Wavelength range

190 ~ 850 nm

Measurement speed

~ 3 s/sp

Spot size

≦20 μm

Measurement repeatability

δ△=0.05°, δψ=0.02°

Variable angle of incidence

Automatic : 65˚~ 80˚, 0.1˚

Sample alignment

Automatic adjustment of height and azimuthal angle,

Manual tilt adjustment

Mapping

Automatic (X,Y,θ) control

: 300 mm wafer

Matching equipment

AFM or NNISE



◈ Schematic Diagram


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◈ Application 

    - Semiconductor : OCD(of HAR) structure, Dielectrics

    - Display : OLED, Dielectrics

 


▣ Supported by : KIAT(Korea Institute for Advancement of Technology)

 


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