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Elli-SE (Ellipsometer)
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Thin Film Thickness Measurement System
Spectroscopic Ellipsometer(SE), the industry standard technology that enables one to accurately measure thickness and optical constants of thin film, simultaneously, is used for characterization of a variety of materials (e.g., dielectrics, semiconductors, organics, etc.) including AR coatings, OLED, and low(high)-materials.
◈FEATURE
1.Easy Operation & Fast Measurement
2.High Reproducibility
3.User-Friendly Operation
4.Non-contact & Non-destructive
5.Multi-Layer Measurement
6.In-Situ (Sutter, ALD,PECVD etc.)
◈SPECIFICATION
| Measuring constants | Film thickness, n, k vs λ |
| Thickness range | sub Å ~ 10 μm (depends on film type) |
| Wavelength range | 220 ~ 850 nm (uv) or 380 ~ 1050 nm |
| Option of Spectral Range | |
| - (Duv:193nm, IR: 900nm ~ 1700nm, 900nm~ 2,200nm) | |
| Throughput | Normal mode(~10 sec) |
| fast mode (1~3 sec) per | |
| point(depends on film type) | |
| Beam Spot-size | 1.5 mm (Optional 100μm, 50 μm, 20 μm) |
| Angle of incidence | 45°~90° (Step 5°, manual type) |
| Number of layers | Up to ten(10) layers (depends on film type) |
| Repeatability | (3σ) ±0.3 Å on 10 times measurement |
| Dispersion relations | Cauchy, |
| Sellmeier, | |
| Lorentz, | |
| Tauc-Lorentz, | |
| Quantum-Mechanical, | |
| Drude-TL, | |
| Drude-QM and more | |
| Providing features | Refractive Index, Extinction coefficient and optical band gap |
| Film density and composition, Material's dispersion function library | |
| User defined models capability, Data import & export functions, - | |
| Extendable library |
◈OPTION
1.Auto Mapping Stage (150 mm, 200 mm, 300 mm, Customized Size)
2.Option of Spectral Range (UV: 193 nm ~ 1,050 nm), (IR: 900nm ~ 1,700nm, 900nm~ 2,200nm)
3.Micro Spot Option (100 μm, 50 μm, 25 μm)
4.Auto Alignment System, Automated Variable Angle of Incidence (45°~ 90°)
◈APPLICATION
·Thickness of Dielectrics, Semiconductors, Polymers,
·Supporting Backside/Front side Reflections
·Very Thin Films, Very Thick Films
·Variable Substrates (Silicon, GaAs, , Al, Steel, Glass, Al2O3, PC, PET, Polymer films and Others)
- Semiconductor : Si, Ge, ONO, ZnO, PR, poly-Si, GaN, GaAs, Si3N4
- Display(incl. OLED) : ITO, PR, MgO, Alq3 , CuPc, PVK, PAF, PEDT-PSS, NPB, SiO2 , ONO
- Dielectrics : SiO2 , TiO2 , Ta2O5 , ITO, AIN, ZrO2 , Si3N4 , Ga2O3 , Wet oxides
- Polymer : Dye, NPB, MNA, PVA, PET, TAC, PR
- Chemistry : Organic film(OLED) & LB Thin film
- Solar cell : SiN, a-Si, poly-Si, SiO2 , Al2O3